Design and Modeling of Nonlinear Coupled Mems Resonator using Electrostatic Actuation for L-Band Mobile Satellite Communication

This research presents a Micro Electro-Mechanical System (MEMS) resonator structure a creative style and miniature sizing to meet the requirements of performance.There are essentially grown an interconnection of mass, spring and actuators to perform the desired functions. The goals of inter-digitated comb finger structures are demonstrated to be effective for electrostatically exciting the resonance of microstructures and characteristics of static displacement.The aim of this paper focused on exploiting nonlinear behavior arises from coupled effects of the flexural beam structure on a mechanical system and coupling to improve the performance of MEMS resonators using sensing applications. The key research presents output are resonant frequencies of the laterally-driven structures range 1.6 GHz, quality factors range 32 in air and capacitance displacement of 4.425 fF. For developing the comb drive resonator structure driving voltages are applied to inter-digitated comb fingers and this voltage produces an electrostatic force between movable finger and fixed fingers. Since the overlapping comb fingers are used to generate capacitive coupling for the actuation mechanism on lateral and transversal movements. The device using two sets of non inter-digitated comb drives, one for tuning and one for actuation, that allow the effective linear and nonlinear stiffness to be electrostatically tuned. This work mainly focuses on the design and testing of tunable parametrically excited MEMS resonators to demonstrate a novel nonlinear tuning scheme developed for communication systems.The modeling, analysis and design of these MEMS resonators are presented.The electrostatic actuation on a comb drives MEMS resonator has be suitable for L band use of mobile satellite communication system applications. The geometries are two dimensional structures based on the coupled nonlinear electrostatic comb drive MEMS resonator is designed and analyzed for using COMSOL Multiphysics 4.4 software. The measured data are compared with the analytical and simulation results.