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Low Temperature Deposition of ZnO Thin Films on Polymer Surfaces by Plasma CVD.
Low Temperature Deposition of ZnO Thin Films on Polymer Surfaces by Plasma CVD.
2001
Anma Hidetaka
Yoshimoto Yuji
Tanaka Mariko
Hatanaka Yoshinori
Keywords:
Plasma
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Nanotechnology
Materials science
Polymer
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Thin film
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