Diffraction efficiencies of holographic laminar and blazed types gratings for use in a flat-field spectrograph in the 50-200 eV range for transmission electron microscopes

A versatile soft x-ray flat-field grating spectrograph to be installed to a conventional transmission electron microscope has been developed. A holographic spherical grating of a 1200-lines/mm effective groove density which places emphasis on the low energy region of 50-200 eV is designed by an aspheric wavefront recording system. Laminar and blazed types master (LM and BM) gratings and their respective replica (LR and BR) gratings are fabricated by holographic exposure and ion-beam etching methods. Absolute diffraction efficiencies in the 50-300 eV range at the angle of incidence of 86.0 degrees were measured using a synchrotron radiation. The first order diffraction efficiencies are 6.1-7.5% (or 12%) for LM (or BM) and 7.4-9.6% (or 13%) for LR (or BR) gratings at near 55 eV, and over 5% (or 8%) in the 50-200 eV range for LM and LR (or BM and BR) gratings. The replica gratings show the comparable first-order diffraction efficiencies with their respective laminar and blazed types of master gratings.