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Quantitative scanning capacitance microscopy analysis of an ultra-shallow pn junction.
Quantitative scanning capacitance microscopy analysis of an ultra-shallow pn junction.
2000
V. V. Zavyalov
J. S. McMurray
Spencer David Stirling
C. C. Williams
P. Ronsheim
Keywords:
Secondary ion mass spectrometry
Materials science
Scanning ion-conductance microscopy
Scanning capacitance microscopy
p–n junction
Analytical chemistry
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