Charged particle beam device and image forming method using same

This invention improves the visibility of an image being inspected or measured in an inspection and measuring device for inspecting or measuring microscopic patterns. The inspection and measuring device (1000) comprises: a detection unit (107) for detecting a secondary charged particle (A4) that has been generated from a sample (110) irradiated by a charged particle beam; an image forming unit (50) that receives a detection signal from the detection unit (107) and forms an image of the sample (110); an image processing unit (205) for processing the image formed by the image forming unit (50); and a display unit (215) for displaying the processed result from the image processing unit (205). The image forming unit (50) comprises: an analog signal processing unit that processes an analog signal component within the detection signal from the detection unit (107) to form an image; a pulse counting signal processing unit that processes a pulse signal component within the detection signal from the detection unit (107) to form an image; and an image compositing unit for compositing the image formed by the analog signal processing unit and the image formed by the pulse counting signal processing unit.