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Acemap > Paper > Ion Energy Distribution Studies of Ions and Radicals in an Ar/H$_{2}$ Radio Frequency Magnetron Discharge During a-Si:H Deposition Using Energy-Resolved Mass Spectrometry

Ion Energy Distribution Studies of Ions and Radicals in an Ar/H$_{2}$ Radio Frequency Magnetron Discharge During a-Si:H Deposition Using Energy-Resolved Mass Spectrometry

2012 
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