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Influence of Si Doping on Electrical Properties in GaAsN Thin Films Grown by anAtomic Layer Epitaxy
Influence of Si Doping on Electrical Properties in GaAsN Thin Films Grown by anAtomic Layer Epitaxy
2015
Yuki Yokoyama
Keywords:
Thin film
Atomic layer epitaxy
Epitaxy
Doping
Molecular physics
Materials science
Optoelectronics
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