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Photo-electrochemical (PEC) etching on AlGaInN/AlGaN heterostructures (2)
Photo-electrochemical (PEC) etching on AlGaInN/AlGaN heterostructures (2)
2019
Yuto Komatsu
Masachika Toguchi
Saki Saito
Makoto Miyoshi
Taketomo Sato
Keywords:
Etching
Heterojunction
Electrochemistry
Optoelectronics
Materials science
algan gan
photoelectrochemical etching
Correction
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