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Power Dissipation in a RF Capacitively Coupled Plasma
Power Dissipation in a RF Capacitively Coupled Plasma
2013
T. H. Tran
S. J. You
J H Kim
D. J. Seong
J. R. Jeong
Keywords:
Dissipation
Inductively coupled plasma
Capacitively coupled plasma
Physics
Analytical chemistry
Optoelectronics
Correction
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