Physics of Current Filamentation in ggNMOS Devices Under ESD Condition Revisited

This paper revisits the physics of current filamentation in grounded-gate NMOS (ggNMOS) devices and presents new physical insights which were not addressed in earlier works. A clear distinction between electrical and thermal instabilities is presented. Moreover, filament dynamics under electrical and thermal instability in both silicided and silicide blocked devices is discussed while highlighting observations which contradict with established theory of current ballasting. Interplay between electrical and thermal instabilities and its dependence on the presence or absence of silicide blocking is explored further. Filament spreading in ggNMOS devices and it is dependence on silicide blocking is discussed. Finally, while using the developed physical insights, missing correlation between TLP and HBM extracted failure current of silicided ggNMOS device is explained.