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Invited) Heterogeneous Integration of GaN and Ga2O3 with High Thermal Conductivity Substrates Via Surface Activated Bonding
Invited) Heterogeneous Integration of GaN and Ga2O3 with High Thermal Conductivity Substrates Via Surface Activated Bonding
2020
Fengwen Mu
Tadatomo Suga
Keywords:
Chemical engineering
Materials science
Surface activated bonding
Thermal conductivity
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