An automatic carrier transfer for transferring a substrate carrier in a semiconductor manufacturing post-process and method of transferring the substrate carrier using the same
2012
PURPOSE: An automatic substrate carrier transfer device and a substrate carrier transfer method using the same are provided to prevent a substrate from projecting or being separated through a gate during a transfer by partially closing the gate where the substrate is loaded and unloaded. CONSTITUTION: A grip part (240a) loads multiple processing target substrates inside thereof and is separably fixed to a substrate carrier including an open gate where the substrate is loaded. A substrate projection prevention part (254a) is fixed to the grip part and prevents the substrate from projecting and being separated through the gate by closing a part of the open gate according to the fixing of the substrate carrier and the grip part.
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