Experimental study of the He stopping power into Al2O3 films

Abstract In the present work, we report experimental results of He stopping power into Al 2 O 3 films by using both transmission and Rutherford backscattering techniques. We have performed measurements along a wide energy range, from 60 to 3000 keV, covering the maximum stopping range. The results of this work are compared with previously published data, showing a good agreement for the high-energy range, but evidencing discrepancies in the low-energy region. The existing theories follow the same tendency: good theoretical–experimental agreement for higher energies, but they failed to reproduce previous and present results in the low energy regime. On the other hand it is interesting to note that the semi-empirical SRIM code reproduces quite well the present data.