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Growth of ZnO and GaN Films
Growth of ZnO and GaN Films
2009
J. Chang
S.K. Hong
Koh Matsumoto
H. Tokunaga
A. Tachibana
S.W. Lee
M.W. Cho
Keywords:
Gallium nitride
Materials science
Inorganic chemistry
Optoelectronics
Plasma-enhanced chemical vapor deposition
Thin film
sapphire substrate
Combustion chemical vapor deposition
Pulsed laser deposition
Metalorganic vapour phase epitaxy
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