TNK — synchrotron radiation source for submicron technology applications

V.V. Anashin,E. I. Gorniker,N.G. Gavrilov,V. Korchuganov,G.N. Kulipanov,E. A. Kuper,G.Ya. Kurkin,V.S. Kuzminykh,E. Levichev,Yu.G. Matvejev,A. Medvedko,V. N. Osipov,S.P. Petrov,V. M. Petrov,A.N. Skrinsky,E. Trakhtenberg,V.A. Ushakov,Alexander Valentinov,V.G. Veshcherevich,P.D. Vobly,N.I. Zubkov

TNK — synchrotron radiation source for submicron technology applications

1991

Abstract A general presentation on the main storage ring of the Zelenograd Technological Research Center is given. The TNK SR source is intended to create a basis for the industrial realization of advanced X-ray lithographic technology. A modern analytical center for materials science will be established, based on the TNK facility.

Keywords:

Storage ring
Synchrotron Radiation Source
Research center
Optoelectronics
Physics
Lithography
technological research
Optics
Engineering physics

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