Design and fabrication of SOI micro-ring resonators based on sub-wavelength grating waveguides.

Standard silicon photonic strip waveguides offer a high intrinsic refractive index contrast; this permits strong light confinement, leading to compact bends, which in turn facilitates the fabrication of devices with small footprints. Sub-wavelength grating (SWG) based waveguides can allow the fabrication of low loss devices with specific, engineered optical properties. The combination of SWG waveguides with optical micro-resonators can offer the possibility of achieving resonators with properties different from the traditional SOI rings. One important property that SWG rings can offer is decreased light confinement in the waveguide core; this improves the resonator’s sensitivity to changes in the cladding refractive index, making the rings ideal for refractive index sensing applications. In this paper, we present the design and experimental characterization of SWG based rings realized on SOI chips without upper cladding (permitting their use as sensors). The fabricated rings offer quality factors in the range of ~1k-6k, depending on SWG parameters. Based on the comparison of experimental and simulated data we expect sensitivities exceeding 383 nm/RIU in water and 270 nm/RIU in air, showing excellent potential for use in sensing applications.