Towards routine, quantitative two-dimensional carrier profiling with scanning spreading resistance microscopy

Recent developments in scanning spreading resistance microscopy have enabled to move the technique from the laboratory phase to a commercially available method for 2D-carrier profiling. In view of the large tip consumption methods and software have been developed to arrive at a rapid collection of calibration curves and the characterization of tips. These calibration curves have been integrated in a software package for quantification such that 2D-images can be completely quantified. Scanning Spreading Resistance Spectroscopy (SSRS) has been developed whereby full I-V curves can be collected at every pixel. These developments contribute to a better understanding of the physics of the point-contact, allow to characterize in more detail the electrical behavior of various tips and provide a unique signature for junction identification.