Electron/Ion Optics

Transmission electron microscopes (TEM) have very delicate optical systems in order to fulfill their research purpose, i.e., the characterization of material’s structures in a versatile manner in modern science. High-energy electrons are generated, forming an electron probe with variable sizes to bombard the sample materials. The scattered electrons, which carry details of material’s structures, are reflected to produce a set of data including diffraction patterns, images and spectra.