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Process development for passive photonic circuits on BCB-bonded InP membranes on silicon
Process development for passive photonic circuits on BCB-bonded InP membranes on silicon
2008
Frederic Bordas
Frederik Van Laere
E.J. Geluk
F. Karouta
Dries Van Thourhout
Roel Baets
Mk Meint Smit
Keywords:
Photonic integrated circuit
Electronic circuit
Photonics
Membrane
Silicon
Electronic engineering
Materials science
Optoelectronics
process development
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