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Fabrications and Bonding Strengths of Bonded Silicon-Quartz Wafers
Fabrications and Bonding Strengths of Bonded Silicon-Quartz Wafers
1992
Takao Abe
Atsuo Uchiyama
Katsuo Yoshizawa
Yasuyuki Nakazato
Keywords:
Quartz
Wafer
Materials science
Composite material
Silicon
Correction
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