A 94 GHz low‐cost frequency source using a 47 GHz micromachined air‐cavity oscillator and a doubler

A 94 GHz low-cost frequency source has been developed using a 47 GHz micromachined air-cavity oscillator and a 47-to-94 GHz doubler on the thin-film substrate with the flip-chip interconnection. The 47 GHz micromachined air-cavity oscillator is a parallel-feedback configuration using the micromachined air-cavity as a parallel-feedback element. As active devices of the oscillator and the doubler, GaAs pseudomorphic high-electron mobility transistors were flip-chip mounted on the thin-film substrate with integrated passives. The developed 94-GHz frequency source has an output power of about 3 dBm and a low-phase-noise of −96 dBc/Hz at 1 MHz offset with an oscillation frequency at 94.25 GHz. This work allows a low-cost millimeter-wave frequency source. © 2009 Wiley Periodicals, Inc. Microwave Opt Technol Lett 52: 239–241, 2010; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.24884