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Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
2008
Gert Claes
Rita Van Hoof
Bert Du Bois
Greg Van Barel
Steve Stoffels
Stefaan Decoutere
Nguyen
S. Hentz
P Robert
Jean-Pierre Celis
Ann Witvrouw
Keywords:
Silicon on insulator
Resonator
Electronic engineering
Materials science
Optoelectronics
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