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Infrared picosecond superconducting single-photon detectors for cmos-tircuit testing
Infrared picosecond superconducting single-photon detectors for cmos-tircuit testing
2003
Jin Zhang
A. Pearlman
W. Slysz
A. Verevkin
Roman Sobolewski
O. Okunev
A. Korneev
P. Kouminov
K. Smirnov
G. Chulkova
G. Gol'tsman
William Lo
Kenneth R Wilsher
Keywords:
Particle detector
Optoelectronics
CMOS
Optics
Quantum efficiency
Electron-beam lithography
Reactive-ion etching
Picosecond
Physics
Infrared
Photon
Superconductivity
photon detector
Very-large-scale integration
Correction
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