Development and investigation of small-aperture bimorph deformable mirror for correction of low-order aberrations of laser radiation

Bimorph deformable mirror for correction of low-order aberrations of laser radiation was manufactured. Two technologies were used to develop this wavefront corrector: laser engraving technology and ultrasonic welding technology. The mirror has aperture of 10 mm and 13 control electrodes. The thickness of the wavefront corrector is 1 mm. The applied voltages took values in the range from -150 to +200 V. The stroke of the mirror for one electrode was equal to 1 micron (P-V). The first resonant frequency was found at 10.8 kHz. Such mirror can be used in closed-loop adaptive optical system with speed about 1.1 kHz.