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Spectroscopic diagnostics of hydrogen radicals in EUV induced hydrogen plasma
Spectroscopic diagnostics of hydrogen radicals in EUV induced hydrogen plasma
2020
Chang Liu
Nozomi Tanaka
Baojun Zhu
Kyungsik Kang
Youngduk Suh
Jeonggil Kim
Ken Ozawa
Takeshi Takagi
Minoru Kubo
Shinsuke Fujioka
Keywords:
Photochemistry
Plasma
optical emission spectroscopy
Materials science
Extreme ultraviolet lithography
hydrogen radical
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