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Chemical Aspects of Reactive Metal and Energetic Ion Interactions on Polyimide
Chemical Aspects of Reactive Metal and Energetic Ion Interactions on Polyimide
1987
Ralph G. Nuzzo
Y. H. Wong
G. P. Schwartz
Keywords:
Organic chemistry
Polyimide
Thin film
Metallizing
Chemistry
Ion
Aluminium
Metal
Correction
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