Capacitive Pressure Sensor Mock-up Without Compensation Circuits

A pressure sensor mock-up has been fabricated with an integrated capacitive pressure sensing cell and a CMOS switched capacitor circuit to evaluate the feasibility of sensors requiring no compensation circuits for the thermal drift and noulinearities. The measurements made on this demonstrator and the analysis of potential improvements show that it must be possible to develop a sensor featuring : a linear response, an accuracy in the order of a few percents, a power consumption of 7.5 mW for a 5V supply voltage.