Old Web
English
Sign In
Acemap
>
Paper
>
A comparison of microactuator concepts in view of fabrication technologies and applications.
A comparison of microactuator concepts in view of fabrication technologies and applications.
1996
Schulz J
Bley P
Zum‐Gahr K H
Menz W
Mohr J
Keywords:
Manufacturing engineering
Nanotechnology
Fabrication
Microactuator
Materials science
Engineering
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]