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Characterization of Post-Copper CMP Surface Leakage with Scanning Probe Microscopy
Characterization of Post-Copper CMP Surface Leakage with Scanning Probe Microscopy
2006
Alexandre Dominget
Sebastien Petitdidier
Maria-Luisa Calvo-Munoz
Janos Farkas
Sabine Szunerits
Keywords:
Scanning probe microscopy
Leakage (electronics)
Copper
Scanning capacitance microscopy
Scanning ion-conductance microscopy
Analytical chemistry
Materials science
Optoelectronics
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