High Q-factor near infrared and visible Al2O3-based parallel-plate capacitor kinetic inductance detectors

We designed, fabricated and characterized parallel-plate capacitor lumped-element kinetic inductance detectors (LEKIDs) to operate at near-infrared and optical wavelengths (0.3 −1 μm). The widely used interdigitated capacitor is replaced by a parallel-plate capacitor which, for a given resonance frequency, has a larger capacitance value within a much smaller space allowing to strongly reduce the size of the pixels. The parallel-plate capacitor LEKID array comprises 10 × 10 pixels. The inductive meander is patterned from stoichiometric 52 nm-thick TiN film (Tc ≈4.6 K). The parallel-plate capacitor is made of a TiN base electrode, Al2O3 dielectric and Nb upper electrode. More than 90 resonances out of 100 within the 0.994-1.278 GHz band were identified. The resonances exhibit internal Q-factors up to ∼370 000 at 72 mK. The array was illuminated using a white light and 890 nm monochromatic near infrared LEDs. The estimated quasiparticle lifetime is τqp≈13 µs.