Design and experiment of a cantilever beam pressure sensor using an optical microring resonator

Abstract Recently miniaturization, integration and high sensitivity are becoming the mainstream of the development of pressure sensing technology. This paper proposes a pressure sensor realized with the microring resonator on a cantilever beam. The performance of the pressure sensor is theoretical analyzed and then simulated using finite element modeling. It shows that the cantilever beam substrate can greatly improve the sensitivity compared with a simple supported beam. The fabricated microring resonator pressure sensor has 3 dB bandwidth of about 0.1488 nm and a Q-factor of 10511. The experimental results demonstrate that the resonant wavelength shift of the microring pressure sensor has an almost linear relationship with the displacement of pressure testing device.