Tabletop coherent diffraction imaging with a discharge plasma EUV source
2013
We present a coherent diffraction imaging (CDI) experiment using a high-frequency discharge plasma based, extreme
ultraviolet (EUV) source. By using different illumination geometries, we generated EUV beams witha varying degree of
spatial coherence, which were used to produce far field diffraction patterns from test objects. We then successfully
reconstructed an illumination wavefront defined by a circular aperture. The present work explores the feasibility of
compact tabletop CDI using a discharge plasma EUV source emerged from the technology development of EUV
lithography, which can potentially find application in nanoscience and metrology.
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