Ellipsometric characterization of Si nano-particles formed in SiO/sub 2/ films as an electro-luminescence element

An aggregation of Si nano-particles is very attractive due to its potential application to the light emitting devices. Many researches are carrying out their studies intensively in this field. The size and the number density of Si nano-particles formed in the SiO/sub 2/ film are of most interest and important factors in the fabrication process of the light emitting devices. We have tried to determine the concentration ratio of Si nano-particles dispersed in the SiO/sub 2/ film by ellipsometry.