Knife-edge thin film field emission cathodes

Cathodes made of thin-film field emission arrays (FEA) have the advantages of high current density, pulsed emission, and low bias voltage operation. We have developed a technology to fabricate knife-edge field emission cathodes on (110) silicon wafers. The emitter geometry is optimized for efficient modulation at high frequency. The cathode fabrication progress and preliminary analysis of their applications in RF power sources are presented. >