EUROSENSORS 2014, the § edition of the conference series Piezoelectrically actuated linear resonators on ring-shaped suspensions for applications in MEMS phase-sensitive gyroscope

Excitation of linear resonators by means of thin aluminium nitride pi ezoelectric films processed on annular (ring-shaped) flexu res was investigated. The in-plane resonance modes at 8-45 kHz frequencies with quality factors >10 4 were measured for both single (uni-directional) and double (bi-directional) in-plane degree of freedom devices in vacuum. Annular springs have different spring constants for different directions of deformation allowing efficient decoupling of orthogonal modes in bi-directional symmetric devices. The primary application of the bi-directional resonators is in orbiting-motion MEMS gyroscopes that rely on phase-shift detection induced by external angular rates. To investigate the feasibi lity of differential piezoactuation for generation of mo tio n in uni- and bi-directional devices by means of thin piezoelectric films processed on supporting annular springs, MEMS resonators were modelled, designed, fabricated and electrically characterized. © 2014 The Authors. Published by Elsevier Ltd. Peer-review under responsibility of the scientific committee of Eurosensors 2014.