Reproduction of fine structures by nanocasting lithography

Novel reproduction technique for nanostructures is newly proposed based on nanoimprint and nanocasting lithography. First, a master nanostructure is replicated using fluorinated polymer by conventional thermal nanoimprint. Then, the master structure is reproduced using the replicated fluorinated polymer by nanocasting lithography. Using the fluorinated polymer as a mold, fine pattern is successfully transferred without releasing failure. Also, low cost reproduction is realized by nanocasting lithography without using special tools and materials. Using the proposed method, reproduction of the anti-reflection structure having 250nm feature size is successfully demonstrated.