Enhanced photoefficiency in positive-tone direct patterning of metal complexes for forming patterned indium tin oxide films

Abstract The efficiency of positive-tone directly photo-patternable 4-(2-nitrobenzyloxycarbonyl)catechol and 4-(6-nitroveratryloxycarbonyl)catechol complexes of indium tin was improved by tuning the solubility of the complexes and by chelation of maltol as a cooperative photo-solvolytic component, such that films could be patterned at up to 4.88 mW·s/nm in terms of resultant indium tin oxide (ITO). Patterned indium tin complexes were thermally transformed to pattern shape preserved ITO by anisotropic contraction and oxidation. The photo-reaction of these ligands and related derivatives was characterized by nuclear magnetic resonance analysis showing decomposition to the respective carboxylic acid for which linear rate constants were approximated, further elucidating the mechanism and mechanics of selective solubility.