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Detection limit of carbon concentration measurement in Si for photoluminescence method after electron irradiation
Detection limit of carbon concentration measurement in Si for photoluminescence method after electron irradiation
2020
Yuta Satake
Michio Tajima
Shota Asahara
Atsushi Ogura
Keywords:
Analytical chemistry
Photoluminescence
Detection limit
Carbon
Electron beam processing
Materials science
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