A few tens of microjoule full-coherent EUV-FEL seeded by high-order harmonic beam

Eiji J. Takahashi,Tadashi Togashi,M. Aoyama,Koichi Yamakawa,Tadatake Sato,A. Iwasaki,Shigeki Owada,Kaoru Yamanouchi,Toru Hara,Shinichi Matsubara,Kanade Ogawa,Takashi Ohshima,Y. Okayasu,Yuji Otake,Hitoshi Tanaka,Takashi Tanaka,H. Tomizawa,Takahiro Watanabe,Makina Yabashi,Katsumi Midorikawa,T. Ishikawa

A few tens of microjoule full-coherent EUV-FEL seeded by high-order harmonic beam

2013

Output energy exceeding 20 μJ has been achieved in the EUV region at 61 nm by the harmonic seeded FEL scheme. Event ratio of the seeded FEL operation has been dramatically improved by a feedback system with an electro-optic sampling technique.

Keywords:

Optoelectronics
Physics
Tunable laser
Spontaneous emission
Seeding
Harmonic analysis
Optics
Beam (structure)
Harmonic
Extreme ultraviolet lithography
Extreme ultraviolet

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