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Scalability of Ti-salicide Process for sub-0.1um Gate Lengths: Optimization of Arsenic Preamorphization Process
Scalability of Ti-salicide Process for sub-0.1um Gate Lengths: Optimization of Arsenic Preamorphization Process
1999
Sallagoity
Losavio
Marangon
Pipia
Mastracchio
Keywords:
Process (computing)
Materials science
Salicide
Scalability
Optoelectronics
Arsenic
Correction
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