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615 Fast Motion Control of a High Precision Stage using a Synchronous Piezoelectric Device Driver
615 Fast Motion Control of a High Precision Stage using a Synchronous Piezoelectric Device Driver
2005
Truong Ngoc Minh
Atsushi Kamimura
Kiyoshi Ohishi
Masasuke Takata
Seiji Hashimoto
Koji Kosaka
Hiroshi Kubota
Keywords:
Motion control
Control engineering
Computer science
Piezoelectricity
Electronic engineering
fast motion
Control theory
Correction
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