The Determination of the Effective Radius of the Tip of the Probe of an Atomic Force Microscope Using Monodispersed Silicon Oxide Nanoparticles

a diameter of 26.6 ± 3.5 nm, distributed uniformly on the surface of a single-crystal silicon substrate of area 1 cm with a mean particle surface density of about 0.5 particles/μm is developed. The use of the test structure obtained to determine the effective radius of the tip of the probe of a scanning atomic-force microscope is demonstrated.