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Growth of Thin Film Ferroelectric PZT, PHT, and Antiferroelectric PHO from Atomic Layer Deposition Precursors
Growth of Thin Film Ferroelectric PZT, PHT, and Antiferroelectric PHO from Atomic Layer Deposition Precursors
2020
Nicholas A. Strnad
Brendan Hanrahan
Daniel M. Potrepka
Jeffrey S. Pulskamp
Raymond J. Phaneuf
Ronald G. Polcawich
Keywords:
Materials science
Antiferroelectricity
Chemical engineering
Thin film
Atomic layer deposition
Ferroelectricity
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