Calibrated charged particle radiation system with precision dosimetric measurement and control

Abstract We describe a charged particle ( Z = 1 or 2) radiation system established by the Naval Research Laboratory at the Crocker Nuclear Laboratory, Davis CA. This system is used to provide proton and other charged particle radiations at energies from 10 to 70 MeV on microelectronic target devices and materials predominantly for the simulation of the space environment. The dosimetric measurement and control is accurate to better than 2%. Both single and integrated particle effects can be measured with a range of fluxes from approximately 5 × 10 8 particles/cm 2 s to 1 × 10 12 particles/cm 2 s.