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Quantitative scanning capacitance microscopy analysis of an ultra-shallow pn junction.
Quantitative scanning capacitance microscopy analysis of an ultra-shallow pn junction.
2000
V. V. Zavyalov
J. S. McMurray
Spencer D. Stirling
Clayton C Williams
Paul Ronsheim
Keywords:
Scanning capacitance microscopy
Materials science
Optoelectronics
p–n junction
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