PLD-Fabricated Isotropic Pr–Fe–B Film Magnets Deposited on Glass Substrates

Pr–Fe–B thick-film magnets were deposited on glass substrates without a buffer layer using a pulsed laser deposition method to apply the films to micro-electro-mechanical systems. Large particles with the average diameter of approximately $50~\mu \text{m}$ were emitted from a target and enabled us to obtain the relatively high deposition rate of $30~\mu \text{m}$ /h. An approximately $100~\mu \text{m}$ -thick Pr–Fe–B film with the $(BH)_{\text {max}}$ value of 70 kJ/ $\text{m}^{3}$ could be obtained. After polishing a Pr–Fe–B thick film deposited on a glass substrate with groove, the magnetic properties of the film did not deteriorate.