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New physico-chemical approaches in Area-selective Atomic Layer Deposition and Atomic Layer Etching: the case of ZnO
New physico-chemical approaches in Area-selective Atomic Layer Deposition and Atomic Layer Etching: the case of ZnO
2018
A. Mameli
Bora Karasulu
Verheijen
Adriaan J. M. Mackus
Wilhelmus M. M. Kessels
F. Roozeboom
Keywords:
Etching
Atomic layer deposition
Materials science
Inorganic chemistry
Chemical engineering
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