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Study on the formation and mechanism of aluminum bulge defect in semiconductor integrated circuit manufacturing
Study on the formation and mechanism of aluminum bulge defect in semiconductor integrated circuit manufacturing
2021
Liantao Ji
Chuanyong Jian
Qingcui Ma
Qingqing Liu
Yazhou Hua
Keywords:
Materials science
Bulge
Optoelectronics
Mechanism (engineering)
Aluminium
integrated circuit manufacturing
Semiconductor
Correction
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