MEMS atomization chip for electronic cigarette

The invention discloses an MEMS atomization chip (11) for an electronic cigarette. The MEMS atomization chip comprises a sealing micro-ring (19), a micro-orifice plate (17), a vibration film (21) and a liquid cavity (22) formed by vibration film (21). A driver (18) is arranged on the outer side of the vibration film (21). A micro-orifice array (13), a liquid inlet (15) and a micro-valve (20) are arranged on the micro-orifice plate (17). The inlet diameter of micro-orifices in the micro-orifice array (13) is larger than the outlet diameter. The outlet diameter is of a micrometer or nanometer scale.