DFM lessons learned from altPSM design
2008
The design challenges associated with alternating phase shifted mask lithography are discussed, solutions which had
been developed to address these challenges are reviewed, and parallels to current design for manufacturability
implementation issues are identified. Leveraging these insights, the positive attributes of a well integrated design for
manufacturability enhanced design flow are proposed. Specific topics covered in the paper are: the need to complement
error-detection with streamlined layout-correction, the risk of providing too much unstable information too early in the
design optimization flow, the efficiencies of prescriptive 'correct-by-construction' solutions, and the need for seamless
integration into existing design flows. For the benefit of the non-lithographer, the discussion of these detailed topics is
preceded by a brief review of alternating phase shifted mask lithography principles and benefits.
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